X-9200 / X-9200L
Tube Voltage
130KV/90KV
Focal Spot Size
3μm/5μm
Geometric Magnification
450X
Stage Size
740x690mm / 650x1220mm
Inspection Area
680x660mm / 620x1200mm
Detector Resolution
1536x1536px
X-9200L Semiconductor Inspection System Achieving a minimum detection accuracy of 1 µm, this system is designed for high-precision testing of integrated circuit chips and semiconductor components, including:
• BGA
• IGBT
• Flip chips
• PCBA soldering
• LED bonding
• IC packaging
It is widely used in industries requiring ultra-fine defect detection and quality control in semiconductor manufacturing and assembly.
Technical Specifications
Model
X-9200 / X-9200L
X-ray Tube Type
Closed Tube
Focal Spot Size
3μm/5μm
Tube Voltage
130KV/90KV
Tube Current
300μA/200μA
Geometric Magnification
450X
System Magnification
2000X
Detector Resolution
1536x1536px
A/D Conversion
16bit
Frame Rate
20fps
Detector Tilt Angle
60°
Stage Size
740x690mm / 650x1220mm
Inspection Area
680x660mm / 620x1200mm
Maximum Load
≤20kg
Machine Dimensions
1542x1943x2215mm(L*W*H) / 1512x1912x1799mm(L*W*H)
Machine Weight
1800KG
Operating System
Win11
Power Supply
AC110-220V 50-60Hz
Rated Power
1800W
Radiation Leakage
<1μSv/H